Patent Certificate No. 10-2735733 Method of Manufacturing a Wafer Chuc… Main text . List Prev Patent Certificate No. 10-1387916 Heater-Integrated Electrostatic Chuck 24.12.12 Next Gyeonggi Provincial Economic and Science Promotion Agency Director's Award 24.12.11 댓글목록 등록된 댓글이 없습니다.