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HANBAEK PRECISION CORPORATION_SEMICONDUCTOR WAFER VACUUM CHUCKS

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We specialize in manufacturing and supplying precision components and modular products for a wide range of machinery, including semiconductor production equipment, bio-tech, secondary batteries, aerospace, and robots. Through ODM/OEM partnerships, we provide tailored solutions by proposing ideas and designs aimed at enhancing functionality.

Hanbaek's semiconductor wafer vacuum chuck is a critical component of semiconductor manufacturing equipment, designed to securely hold wafers in place while ensuring their flatness and parallelism throughout various manufacturing processes. Our vacuum chucks maintain flatness tolerances of 3μm or less for oxygen-free high conductivity copper (OFHC), aluminum, and SUS materials. We can process wafers in sizes of 6 inches, 8 inches, and 12 inches. Additionally, we offer brazing options for 2 Floor, 3 Floor, and 4 Floor configurations to ensure compatibility with advanced processing technologies.