특수소재 반도체분야의 진공클램핑용 메타포 METAPOR® CE100 WHITE / CE170 WHITE / BF100 AL
본문
|
CE 100 WHITE |
MA 100 BLACK |
BF 100 AL Gray |
Units | Standard |
Density |
1.7 |
3.3 |
1.8 |
g/cm3 |
|
DShore hardness D |
86 |
90 |
86 |
| DIN EN ISO 868 |
Flexural strength |
28 |
32 |
20-21 |
MPa˅N/mm2 | DIN EN ISO 178 |
E-module |
9900 |
10700 |
6800 |
MPa˅N/mm2 | DIN EN ISO 527 |
Impact strength |
1 |
1 |
8~10 |
kJ/m2 | DIN EN ISO 179-1 |
Compressive strength |
62 |
69 |
33 |
MPa˅N/mm2 | DIN EN ISO 604 |
25-125°C Coefficient of thermal expansion |
27 |
14 |
32 |
ppm/K ˅ , 10-6 x K-1 | ISO 11359 |
20°C Heat conductivity |
1.7 |
1.3 |
20.9 |
Wm-1 x K-1 ˅, W/m xK | DIN EN ISO 22007-2 |
Specific surface resistance |
>10^6~10의^9(대전방지) | >2*10의6승 (완벽대전방지) | >500 |
Ohm | DIN EN 62631-3-2 |
Dimensional stability |
108 |
108 |
108 |
°C | DIN EN ISO 75-1 |
Mean pore diameter |
22 |
19 |
41 |
µm |
|
Total porosity |
20 |
21 |
17 |
% |
|
Air permeability * |
100% |
100% |
100% |
% |
|
|
경화된에폭시수지(10-35%)+수산화알루미늄과립(65-90%) |
경화된에폭시수지(10-35%)+산화철(65-90%) |
경화된에폭시수지(10-35%)+알루미늄과립(65-90%) |
|
|
- 이전글 METAPOR® CE100 WHITE porous material 24.09.25
- 다음글 METAPOR® CE 100 WHITE 다공성알루미나 24.09.02